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WaferHome can manufacture the high quality Silicon Carbide Wafer(SiC wafer)
Specification for Silicon Carbide Wafer(SiC wafer)
Grade(等级) | Dimeter(直径) | Polytype | Type/dopant(类型/掺杂) |
Orientaion |
thickness(厚度) | Micropipe Density/ cm-2 | Resistivity(电阻率) | Flat |
Surface/Roughness(表面粗糙度) | Usable area | FWHM |
---|---|---|---|---|---|---|---|---|---|---|---|
Prime | 50.8mm 76.5mm 100mm | 6H | Intrinsic | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 10 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 90% | <50 arcsec |
50.8mm 76.5mm 100mm | 6H | N(Nitrogen ) | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 10 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 90% | <50 arcsec | |
50.8mm 76.5mm 100mm | 4H | Intrinsic | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 10 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 90% | <50 arcsec | |
50.8mm 76.5mm 100mm | 4H | N(Nitrogen ) | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 10 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 90% | <50 arcsec | |
test | 25.4mm 50.8mm 76.5mm | 6H | Intrinsic | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 20 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 80% | <50 arcsec |
100mm 125mm 150mm | 6H | N(Nitrogen ) | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 20 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 80% | <50 arcsec | |
200mm | 4H | Intrinsic | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 20 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 80% | <50 arcsec | |
300mm | 4H | N(Nitrogen ) | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 20 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 80% | <50 arcsec | |
probation | 25.4mm 50.8mm 76.5mm | 6H | Intrinsic | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 30 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 70% | <50 arcsec |
100mm 125mm 150mm | 6H | N(Nitrogen ) | <0001> or special orientation |
250um+/-20 330um+/- 20 customization | ≤ 30 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 70% | <50 arcsec | |
200mm | 4H | Intrinsic | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤ 30 | 1 - 10 *E10ohm-cm/Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 70% | <50 arcsec | |
300mm | 4H | N(Nitrogen ) | <100> or special orientation | 250um+/-20 330um+/- 20 customization | ≤30 | 0.001 - 0.1 Ohm-cm /Customization |
16mm 22.5mm 32.5mm | polished/etched polished/polished | 70% | <50 arcsec | |